A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation
نویسندگان
چکیده
منابع مشابه
A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation
In this work, the dielectrophoretic force (F(DEP)) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implemented in the fabrication of Tapered Aluminium Microelectrode Arrays (TAMA). The F(DEP) is investigat...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s150510973